1

Fine structure of Si LVV and N KLL Auger signals for thermally nitrided SiO2 films

Year:
1984
Language:
english
File:
PDF, 229 KB
english, 1984
2

Deformation of Silicon Wafers by Thermal Oxidation

Year:
1982
Language:
english
File:
PDF, 1.27 MB
english, 1982
6

Application of IPOS technique to MOS ICs

Year:
1979
Language:
english
File:
PDF, 974 KB
english, 1979